VarioMetric novel metrology tool
VarioMetric measurement system is a novel optical based solution for non-contact metrology of thick and thin materials.
Based on spectroscopic reflectometry, VarioMetric measures highly doped substrates, rough and curved surfaces, thickness from 900 mm.
- Measurement time <400 ms
- Can measure through high doping concentrations
- Insensitive to rough, curved and patterned surfaces
- Small footprint
VarioMetric is a Varioscale solution
