VarioMetric novel metrology tool

VarioMetric measurement system is a novel optical based solution for non-contact metrology of thick and thin materials.
Based on spectroscopic reflectometry, VarioMetric measures highly doped substrates, rough and curved surfaces, thickness from 900 mm.

• Measurement time <400 ms
• Can measure through high doping concentrations
• Insensitive to rough, curved and patterned surfaces
• Small footprint

Varioscale solution