Dprober
A six- position, door-mountable solution
The dProber is a standard system mounted on a custom door designed to replace the door of the customer’s Scanning Electron Microscope (SEM) or Focused Ion Beam ( FIB) System.
The Door-mounted Analog Probing Solution
The dProber is comprised of a state-of-the-art six positioners Nanomanipulator and XYZ sample stage, a parametric analyzer, an advanced anti-contamination system, an industrial grade load lock, and custom software to control and integrate each component.
The dProber incorporates a load lock which allows the DUT to be moved into and out of the system vacuum chamber, and is designed for quick transfer of samples in an ultra-clean environment. The load lock is mounted on a custom-designed DCG door which replaces the standard door of the SEM or FIB system. Our most advanced anti-contamination system rigorously cleans the SEM/FIB, enabling the user to achieve superior ohmic contact.
Electrical characterization for device quality and failure analysis
4 to 6 point probing
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 Kelvin probing |
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dProber is a FEI EFA group solution
DproberTM
A six- position, door-mountable solution
The dProber is a standard system mounted on a custom door designed to replace the door of the customer’s Scanning Electron Microscope (SEM) or Focused Ion Beam (FIB) System.
