VarioMetric novel metrology tool

VarioMetric measurement system is a novel optical based solution for non-contact metrology of thick and thin materials.
Based on spectroscopic reflectometry, VarioMetric measures highly doped substrates, rough and curved surfaces, thickness from 900 mm.
  • Measurement time <400 ms
  • Can measure through high doping concentrations
  • Insensitive to rough, curved and patterned surfaces
  • Small footprint


VarioMetric is a Varioscale solution varioscale

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