A four probe system for existing FIB/ SEM
The DCG Systems sProber, part of the NanoWorks® product line is designed and optimized to electrically probe sub-100nm features on semiconductor devices. The sProber is a full-featured nanoprobing solution for semiconductor or failure analysis lab customers on a tight budget who already own an SEM or FIB system.
The Complete Analog Probing Solution
The sProber system consists of a state-of-the-art nanomanipulator, a parametric analyzer, an advanced anti-contamination system, and custom software to control and integrate each component. The sProber is uniquely designed for the customer’s existing Scanning Electron Microscope (SEM) or Focused Ion Beam (FIB) System. The system is easily installable and removable by the user, allowing for optimum usage of the SEM/FIB.
The system has four positioners with better than 2 nm resolution of movement. The user can manipulate the probes and positioners using a high precision joystick. The software provides accurate control by tuning the motors and joystick to each user’s preference. The center stage moves independently of the probes in the Z direction for higher throughput and easier operability. The center stage and sample holder can also be designed to integrate with the load lock if the SEM/FIB is equipped with one.
The sProber’s electrical characterization system is specifically designed for low-noise measurements. Our most advanced anticontamination system rigorously cleans the SEM/FIB, enabling the user to achieve superior ohmic contact.
An easy-to-use Windows based software platform seamlessly integrates all of the components of the sProber. The software also provides instant feedback to the user and can be controlled via a powerful scripting engine.
- Electrical characterization for device quality and failure analysis
4 points probing
Active Voltage ContrastOpen via analysis
Temperature characterization option
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